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Title: Electron beam decomposition of CdCl2
Authors: Green, M.
Aidinis, C. J.
Fakolujo, O. A.
Issue Date: 1984
Publisher: American Institute of Physics.
Abstract: The e-beam stimulated reaction, CdCl2 (s)----Cd(s) + 2Cl(g), has been studied in cadmium chloride thin films between 303 and 483K using 2-keV electrons. The dose required to make 90-mm-deep holes at 483K is 3 X10-3 Ccm-2. Extrapolated dosing levels of ~6X10-5 C cm-2 are expected. The use of CdCl2 as a positive-type electron resist in a new scheme is proposed. A working model, useful for considering the e-beam stimilated decomposition energetics and mechanism, is briefly discussed.
ISSN: 0021-8979
Appears in Collections:scholarly works

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